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智慧財產及商業法院112年度行專訴字第41號

關鍵資訊

  • 裁判案由
    發明專利舉發
  • 案件類型
    智財
  • 審判法院
    智慧財產及商業法院
  • 裁判日期
    113 年 02 月 22 日

11241 1130111 1128711217303940 93122 3693137217I282385() 2623224 110123111415(110123 773)116329101225262834362632241111129(111)05162000000000001114151811132427293335910122526283436 116 11000.001110122628101621111016319 420 263 11632 0.0011123 1使 116調11調 2100.0030.9330(0.010.10.05) 11632 11001 () 120.0030.93101001 調12131 1234( 1100) 1 2 3 4 1213132 1213413 81416 28111315172427293133351811132427293335 1811132427293111000.0011263 13211 沿()1100()0.001 123 0.0030.051321100調123 1321213132 1611沿1 100 0.001120.00330.0516 1100248 16調1348161213413816416 1416 218116124 41553612168 218 1213112134138 141612131341351362121341381345134618 31921810-3(Torr)10-6153121352121345 1812135 3121345 19 4203192 55312 13531213451912135 412 134520 52121810-310-6245612763調 12367 1236267使 52112136212 18121271367 51212721 6225212 45763 121271367512127 21121271367612127 22 723218121 121321213418121 371 213423 82433723321231213 73212134231213833 12134 24 11273511632 ()509037調121313212 1341416 13123 113512313427 1329116 420 12調121311213416124 1341329 14 11100 0.0011調13414 13 14153031116 1:11:10 1:11:51:11:10 1:11:5214 178171912 348 141530311213112134138 1416124128134 138141530 31 1716161 12134 1381416 121341381417181113242729312631811132427293335224 116 1(PVD)263262PVD 123(1-1-21-1-31-1-4)23(1-1-31-1-4)1 AlAgAuCrNiIn1 ( )沿() 1 231100 2 1 12 1 25% 20.000150Pa118 0minHeNeArKrO2 0.05-95%HeNe ArKr4510-210-3torr1001000 99% 3610-310-5torr 12*10-4torr7()() 8 1213 1161213134135 1362 121351 3634 12127136 56 1213 78131231114 124134 13124128134138141512 13413814161712134138 13451346 1812 1345192012127 212212 1342324123134 271241342912412813413830311213 32331231335 18111324272931263() 12131 32 12131341351 362 224 12135 34224 121271367 56224 12137 83322413123 1135224 1412413413224 12412813413814153031224 12134138141617224 121341381345134618224 1213451920224 12127 2122224 12134 2324224 12313427224 12413429224 (922693 71)21221224 263 3611632 1101231114151101231114151114151111221 11632 910122526283436 (22019) 1 91西1992128 JPH0424233( ) 1992128(2004122 )1( AlAg) ( 1N0112611 2)22003430CN1414168 2 0.003-0.9 0.001-1 0.1-100(1N0112512110)319945 6JPH06123067 ( 使) 3 使/ 8%90% (0.0051)(1N01120117 00060007)42004621TW593492 4 ( 1N0111675)52004121TW5730945 10-2~10-3torr 100~100099% 使(1N017468)6200056 KR2000-0025045( ) 6 10-310-5torr1300150 0100- 1000Å(1N016763) 719985J. F. Groves, DirectedVapor Deposition,University of Virginia, Ph.D. Dissertation, 1998. 7 使()()(1N01628) 82000711JZ0000000006() 8 使0.5-30( 1N017500170019)91998428JPH10110257()9 (DLC) (1N0141) 18111324272931263 1.18111315使沿1624272931使沿 2.1 11000.0011116 1(309310538 使10使調( 19) 0.0040.01 116 0.0011110.0011 3.PVD116( 3743795455481619193194) 調( )調 沿/ 263 12131 32 1.1 71A.1B. 1C. 1D.使 1E.沿 1F. 11001G. 0.001 1()1238 781316AlAgAuAlCuAlAgAuCu1217101 11A1B1C1D1E1F1G 2.10沿沿1 使1 1使 使穿調1 1E 3.調()調( ) 調1 21310 調0.003-0.9(3-900)2 3-900 2調111F 4.調( )調 ()( ) 調1 11G 1E1F1G1212121 121 5.30006 PVD 使使0.005μm1μm(5-1000) AlCu1 3 13調1 11F 13131313113 1 6.1使 1調 (46505025038688158159)1使 11使1 1沿 --- ()沿1沿 1 111 1沿 調調調1 7.20.003-0.921使沿11002 1 1 (5153505506138139161162)210 0.003-0.9(3-900)20.003-0.912122使 3-900 2使12 1 8.310~100 3 11D1E1F 311 (5356507508 139140163164) 3PVD使使0.005μ m1μm(5-1000) AlCu3PVDAlCu10~1001 沿131 3 113 133使11 9.11G 13131 13調(5859510140 141166) AlAgAu使0.00111 12(1~100) 13(1~100) 1 13121 3(6062141142)12 3PVD使131213120.003-0.9310~10011213(6263142)1使 沿231使1使1 1 1 1312131 3232432A. 32B.沿32C.110032D.0.0011( )116173213232B沿32C 110032D0.00111沿使穿調1 32B 32C23-900 2調132C32D32B32C32D1212 1232 3PVD5-10003調132C 3213使1332131332 12131341351 362224 1.211 121316AlAgAu2110使30012 212 131 12132 2.1AlAgAu 使AlAgAu3AlCu PVD使 AlCu4 5使 6 使13456 134 13513641553 10-2~10-3torr100~100099%6210-310-5torr13001 500 456 2 132 134135136 2 1213534 224 1.322 10-3(Torr)10-62110使25/60.0001~50Pa(7.5*10-7~3.75*10-1Torr)HeNeAr6/6Ar0.01Pa(7.5*10-5Torr)5 3使 10-2~10-3torr 調312 135212135 3 2.433 25/6HeNeAr6/6Ar53 使HeNeAr4121353 121354 121271367 56224 1.522 10-310-6121316AlAgAu2*10-4Torr24/65/60.0001~50Pa(7.5*10-7~3.75*10-1Torr)HeNeAr6/6ArO20.01Pa(7.5*10-5Torr) 調512 2 125 2.1 2 使7 127 使127763()()7 調5 125 127 5 3.1 3 6 使7 1367使1367121316AlAgAu2*10-4Torr6210-310-5torr763 ()()調5 136 21367 5 4.655 25/6HeNeAr6/6Ar763()使HeNeAr6 12127 13675 121271367 6 1213783 3224 1.722 1213 16AlAgAu 使2110使23 使 71213 21213 7 2.877 12 1316AlAgAu 21310使 使AlAgAuCu8 1213 7121383.333232 12 1316AlAgAu AlAgAu 21310 300010010 AlCuAlCu 使 AlAgAuCu33121332 1213 33 1312311 35224 1.1AlAgAu 使AlAgAu2 3AlCu PVD使 AlCu1312311 11509030001 00078~90% 調111112131 1312311 2.353232509030001 00078~90% 調353512133213123 35 1412413413224 1.1AlAgAu 使AlAgAu4 1414調()調( ) 調111F13113 123 8 420 使4113141 1413 2.2 3AlCu PVD使 AlCu14124134141312413413 12134138141617224 1.16716A. 16B.16C.使16D.沿16E.110016F.0.001116G.()123416181AlAgAu 1616A AlAgAu1616B 1616C 使1 沿(16D) 1100(16E) 0.0011(16F)AlAgAu (16G) 2.1 沿使穿調1 1616D調11616E 2 3-9002調1 1616E 調1 1616F 21/62021使1AlAgAu 1616G 16D16E16F16G121612 3.1348134 134 1348134 138 調1 1616E3PVD 5-10003調11616E 415 17使80017 0019481AlAgAu 1616G 16D16E16F16G12348 16134138 4.134 調()調()調1 1616E41517使4 41AlAgAu1616G 16E16G141614 5.16121 3滿 1213( 6492)13 121314(1~100) 138 (1~100) (64669293)1 3PVD使4 8 14138 14138 121341381416 6.171616123878使17121341381416121341381417 12412813413814153031224 1.21/62021使417 使0.150%8 0.530%12348 1234123 4 12348 12412813413814151 1 1:11:10 1:11:5248 1AlAgAu 調141512131124128134138 1415 2.1248124 124 1248124 128303116 161:11:10 1:11:54 17使0.150%481AlAgAu 調303112134138161241281341383031 121341381345134618224 1.181616121316AlAgAu2110使30012 415 1812134138161213413818 2.5310-2~10-3torr 100~100099% 6 2 10-310-5torr130015005618134 181345134618 1213451 9202241.19181810-310-62110使5/60.0001~50Pa( 7.5*10-7~3.75*10-1Torr)HeNeAr6/6Ar0.01Pa(7.5*10-5Torr)53使10-2~10-3torr 調191213451812134 519 2.20191925/6HeNeAr6/6Ar 53HeNeAr201213451912134520 1212721 22224 1.21181810-310-6121316AlAgAu2*10-4Torr24/65/6 0.0001~50Pa(7.5*10-7~3.75*10-1Torr)HeNeAr6/6ArO20.01Pa(7.5*10-5Torr)調2112181221 2.7 763 ()()127 使127 7 調211218127 21 3.22212125/6HeNeAr6/6Ar 763 ()HeNeAr使2212127 211212722 1213423 24224 1.231818121316AlAgAu使2110使3 使2312134 181213423 2.242323121316AlAgAu21310 使使AlAgAuCu2412134 231213424 1231342 7224 13123 271616509030001 00078~90% 調27271213416 12313427 1241342 9224 124 124 2916161238420使 41291213416 12413429 181113242729312631213 132121313413513621213534121271367 5612137833131231135 14124134131241281341381415303112134138141617121341381345134618121345192012127 21221 21342324123134271241342918111324272931263 1811132427293335 12002981         113    2     22         202020 20 49113 34 1. 2. 3. 1. 2. 3. 4.         113    3     1