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臺灣高等法院106年度重上字第13號

關鍵資訊

  • 裁判案由
    損害賠償等
  • 案件類型
    民事
  • 審判法院
    臺灣高等法院
  • 裁判日期
    107 年 11 月 07 日

  • 當事人
    Corial S.A.S.Mr. Abdul LATEEF

         10613    Corial S.A.S.  Mr. Abdul LATEEF              10571110437 107103 () Corial S.A.S. 7576211124201 166 Mr. Andre LECHATMr. Olivier BESANCONMr. Abdul LATEEF(2592602772 89333335)(52131327) 1063245253271 1033漿Corial 300 IL2S/N92 93漿Corial 300 IL -53/58227067232 "Quotation No.14E1 505-5&14E3 511-1& Final Acceptance"5360001034210356power on103414103513調Alexandre Nadege調調1037151031015 1.2. U3.Throughput4. AOI Yield5.Tray Life time2 10416 307.5 19.3227 1041 710427 2592035360001070535000262226024964 847415×2062226024964 8615002688646426022710418 571000268864645 571000536000350006415591105001033 251050010341116750010352716750010363035000104826641551043 8525960809861500 shuttle tray83F.A.T.3 1.54使40Maxis 103 672 10332 70672353600010342561037152/ 8 1122525922222372312313327328364365378379 103715259 7.3 "Quotation No.14E1 505-514E3 511-1Final Acceptance"F.A.T.7.5 "Quotation No.14E1 505-5&14E3 511-1 & Final Acceptance""Quotation No.14E1 505-514E3 511-1 Final Acceptance"Width size 2.67±0.08(um) 2.67±0.081619 188Height size1.7±0.08 (um) 1.7±0.08 1619 188Throughput (4wafers/month)(Pcs) > = 60004 / 60002021188 Etch uniformity within waferU%< 2 %2 2021188 Etching yield > 95AOI Defect sizeum2SML0EVEtching yield > 95952021188 81221186188 for 4" Quaitz shuttle life time to 350 times43502226718924 調調Corial ICP SN 00-00 Process Report30190195 7.2 3 308.1389power onAlexandreNadege 調調223 461045281288調299303 before F.A.TSN921034 2810386SN93103522103722the edge burned of waffers1034 172505. Result is bad, take shuttle back Hsinchushuttle 1034242514.....checkAFM data out of spec...5...checkSN93 AFM data out ofspec also4.AFM...5....SN93AFM 103710253103715 For FAT particaldata collection...Collecction 10 runs AOI datayesterdayArrange FAT 10 runs wafers AFM measurement, waiting data 10AOI10 AFM103716 265SN 93...the data not better...Perform FAT 10 runs, collect AFM data. 9310AFM 103717265 248266103715283 1031015 1.2. U3.Throug hput4.AOI Yield5. Tray Life time29(299303)1031015 10367 使20使AFM AFM282284288300 AFM 34 402010377 SN93 RUN3.Test smell hills to check SN92 haveit also at 20271253漿281288300301103627..3....10runFAT..277調調 使使20213 782014910377調調使20RUN1037 1517調RUN77RUN調15015110377 調103715 使使使2627103421inform Alex,the result of PSS by old type shuttles were well (from previous 2 madxme deltuer)Alex使PSS2 250103424428 Result is bad. take shuttle back Hsinchu .Dummy run with new shuttle, checked He flow and clamping pressure are good使251252116117使 10367 24使184 194199239 113 103619ThroughputMaintenanceParticle LevelHe Pressue AlarmsGPI Helium Alarms 201 使使1037103912調299303調使Marc Derbey 85Marc Derbey 1039 Marc Derbey200 Marc Derbey103715 使227 1 254 942352259112 7.430便7.5 "Quotation No.14E1 505-5&14E3 511-1&Final Acceptance" 60退5 1919.389111037156010416 305360002688646410425 39509597223 3010425 227 滿10437 2 36523083652 2 2591 1536000166 25912 10705 35000 5210332743081034 210356 8 1091031035000 9164155260 227 7.28.1 3 303 89 7.28 使14915091641553RUN10RUN RUN34705 1617166 227260 7.52595360005 3500064155 449145079 107 11 7 2020466 112 107 11 8 466112 1 100500 1030325 1030325 2 100500 1030411 1030411 3 167500 1030526 1030527 4 167500 1030615 1030630