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智慧財產及商業法院104年度民專訴字第36號

關鍵資訊

  • 裁判案由
    侵害專利權有關財產權爭議等
  • 案件類型
    智財
  • 審判法院
    智慧財產及商業法院
  • 裁判日期
    108 年 03 月 22 日

  • 當事人
    ENTEGRIS, INC.Arlene Hornilla

10436    ENTEGRIS, INC.  Arlene Hornilla      Paul Magoon                 108 123 使14Reticle SMIF PodI317967 14Reticle SMIF Pod 3 1 4 7 3 1 168 172 170 175 Peter Walcott Sue Lee Sue Lee 105 6 13244 245 Sue Lee 107 7 23Arlene Hornilla Arlene Hornilla 107 1220124 255 1 2 3 1,000 106 5 4 101 255 1 2 3 196 1 2 881740104 5 5 Reticle SMIF PodI317967 1 1717調106 1217107 1 11107 5 107 4 207 -3207-7 107 3 13Intel Intel 107 4 25調258 15107 4 25343-350 1 149 150-SAV 1711150-SNJ 4 172 1717141714調150-AAP 調196 2 107 5 23107 5 23104 36107000206097-597-7 使 105 111 105 1213105 111821ASYST 2120015 使21105 129 21調調21106 5 1626US4 ,815,91227430124196 2 調108 1 23108 1 4 使調3 92571 2 3 100 591 3 使調調196 2 Intel 107 5 Intel 107 8 1920213940 98121 112 7 2 1 3 4 6 7 9 101213176 7 9 101213171 3 4 1 3 4 6 7 9 1012131796184 1 185 232 177 2 179 108 2 135 1 6 12使使 退101 退 102 1 1 102 1 1 851 2 98101 102 1 1 Intel 100 便100 1,234,323,436 118,600,060 Intel Purchase OrderInvoice 381,413,748 6 7 2 7 9 22,256,512403,670,260 Intel 101,113 2,372 972 1.106 5 4 5 使14Reticle SMIF PodI317967 1 使6 使12使 1 3 4 6 7 9 10121317 1 3 4 1 3 4 1 6 121 6 121 6 123 4 7 9 101317 262 1 3 4 6 7 9 10121317263 1 3 4 6 7 9 10121317264 182 1 1 3 4 6 7 9 101213171 3 1 3 4 6 7 9 101213172 1 3 4 6 7 9 101213172 3 1 3 4 6 7 9 101213174 1 3 4 6 7 9 101213171 4 1 3 4 6 7 9 101213172 4 1 3 4 6 7 9 101213171 3 4 6 7 9 10121317使432 92494 986 12263 4 N01 6 12104 4 116 7 9 10121317使6 7 9 10121317104 4 11退101 1 2555 72738 2008調INTEL 150-SAQ1 50-SAR2009121 使使In tel200920118 12 Rosenfeld 2011105 使5410 45 5 17150-SAW 150-SAAC 2 102 4 107 4 25150-SAQ150-SAR150-S AT150-SAX 150-SAAK150-SAAO 150-S ABF 1 50-SAV 150-SNJ150-ANI 2 105 4 使 2008CEO Argov調 使44調 104 5 調使7 3 使使 17 851 2 Better than Class 1 internal environmentMultiple ESD paths to ground150 mm SMIF interface purge Intel Intel 1.2.3. 216-217 Reticle SMIF Pod 14 986 24laterally slidingly urge 9847489947100 49101 6364102 5 2733Entegris34 123,4323,436118,600,060 Inte l381,413,748 6 7 2 7 9 22,256,512 217-219 1 6 12 1 3 4 6 7 9 10121317 262 ? 1 3 4 6 7 9 10121317263 ? 1 3 4 6 7 9 10121317264 182 ? 1 1 3 4 6 7 9 10121317? 1 3 1 3 4 6 7 9 10121317? 2 1 3 4 6 7 9 10121317? 2 3 1 3 4 6 7 9 10121317? 4 1 3 4 6 7 9 10121317? 1 4 1 3 4 6 7 9 10121317? 2 4 1 3 4 6 7 9 10121317? 1 3 4 6 7 9 10121317使432 ? 962 971 2 184 1 185 177 2 179 232 使 使使 103 5 16201 6 12191 3 4 6 7 9 10121317 使 使 1 1 使 使 6 6 6 使 12 12 14Reticle SMIF Pod343-350 120 140 120 3 122 140 6 142 150 152 2 142 150 120 140 150 152 使150 142 17 1 87111700-000000 1 917 5 1-1 1 1 reticle mask5 6 5 2 1 6 123 5 6 1 1 5 6 5 00173 5 1 2 904 17US 6216873B1SMIFcontainer including a reticle support structure 2 917 5 2-1 2 2 SMIF104 102 104 112 127 102 114 104 102 127 2 3 903 114262183 917 5 3 3 2021222526252627222727252624232727 3 4 863 119-66989 4 917 5 4-1 4 4 1010302030322022a 22b 40204022a 30203032404022b1沿22b1使4022a140 4 21ASYST -150Reticle SMIF Pod 1 20015 917 5 20006 19ASYST 2120027 5 21ASYST 21277 2120027 5 ASYST 21157-158 161-163 106 3 2920001219SINGLE RETICLE SMIF POD 6"3095-01 -150 Reticle SMIF Pod 使8 6.1.8 6.1.9 177-178 106 11106 3 30106 023320001220026 ASYST 使20027 3 使20027 3 ENTEGRIS186-254 212121 1 6 12 584 1 6 12使1 9 1 使使 6 9 9 19102 140 7 208 128 150 152 202 204 210 140 7 8 210 沿152 使200 128 140 120 210 170 使172 204 9 使1 1 使使 6 使12使6 126 9 9 19102 6 12 1 6 121 6 12 1 6 121 使使6 使使12使使使105 2 25104 3667-68 927 3 98121 922 6 937 1 92 262 92262 使 1 6 121 6 126 9 9 19102 使沿262 1 6 122 3 6 8 1 3 126 128 122 9 1114200 122 126 200 使6 1213150 152 使140 120 沿152 使142 6 9 9 10quality area2 3 使 6 9 9 19104 140 7 150 152 202 204 210 140 7 8 210 沿152 使200 128 210 170 使172 204 9 210 143 160 140 120 152 210 210 160 1 6 12 1 4 5 108 7 11142 143 198 10143 145 160 143 142 1 262 1 3 4 6 7 9 10121317263 92263 1 6 121 6 123 4 1 7 9 106 131712263 1 6 126 9 9 19102 使1 使6 使12使1 3 4 6 7 9 10121317 1 6 121 6 123 4 1 7 9 106 1317122 3 6 8 1 3 200 122 1 6 123 4 1 7 9 106 131712使143 210 142 1 3 4 6 7 9 10121317 1 3 4 6 7 9 10121317264 182 92264 182 1 3 4 6 7 9 10121317使quality area使6 1213150 152 使140 120 120 沿152 使142 6 9 9 101 6 12使1 6 123 4 7 9 101317264 182 使quality area6 120 122 140 120 140 150 100 使140 2 3 122 200 1 6 129 9 10140 120 210 170 使172 204 9 150 172 1 6 12 1 1 3 4 6 7 9 10121317 1 1 1 1 3a1 5 5 4 2 2 2a1 2 2 2a1 1 00181 使1 1 1 3a2 3 2 1 1 1 3a1 2 3 1 1 1 1 3a6 124 3 3 3a2 6 5 00201 2a3 1 1 1 00221 2 6 2 3 1 4 使2 2a3 3a2 1 3a1 3a2a1 1 沿3a1 1 使 1 1 使1 1 1 1 1 使1 1 1 1 1 3 4 1 1 1 1 3 4 6 1 1 1 1 5 2 6 3 6 1 6 使1 6 6 1 1 1 6 7 9 106 6 1 6 7 9 10 1 12使1 12121 1 1 12 131712121 121317 1 3 1 3 4 6 7 9 10121317 1 1 6 121 1 使1 6 使1 12使 3 2526271 3 1 6 123 2526271 6 123 1 1 6 123 27252623使使1 3 1 6 121 3 1 6 12 3 4 1 7 9 106 1317121 3 1 6 123 4 7 9 101317 2 1 3 4 6 7 9 10121317 1 2 2 3 5 5457SMIF127 2 3 17127 2 1 使2 3 7 7 25285459104 112 112 126 126 127 2 1 2 1 2 9 5 7 127 A 沿B 2 8 2 17127 2 1 2 8 2429使127 112 128 112 128 調使127 2 9 1 15134 使129 130 134 112 2 9 5 7 調134 112 126 2 133 1617200 使112 126 1 2 3 119 3146102 101 114 61107 114 146 148 148 112 128 2 3 114 148 127 2 1 2 1 使 2 17146 102 使127 146 2 1066116 1 使2 1066116 128 146 便2 146 148 使沿148 2 1 使 2 1 使2 1 2 1 1 使2 112 128 114 148 2 1142502 1 2 1 3 4 1 1 2 1 3 4 6 2 1 2 2 104 112 102 114 6 2 6 使2 6 6 2 2 2 6 7 9 106 6 2 6 7 9 10 122 1 2 2 104 112 102 114 6 2 12使2 12122 2 2 12 131712122 121317 2 3 1 3 4 6 7 9 10121317 2 1 6 122 1 使2 6 使2 12使 3 2526272 3 1 6 123 2526271 6 123 2 1 6 123 27252623使使2 3 1 6 122 3 1 6 12 3 4 1 7 9 106 1317122 3 1 6 123 4 7 9 101317 4 1 3 4 6 7 9 10121317 1 4 4 1 001000134010202022a 22b 401 4 001000111030302030321 4 4 5 7 001500173020303240使40沿22b1沿22a222a1使402022a 22b 30324 30321 4 1 使 4 1 4 1 45474使使4 4 4 0004使4 4 4 1 6 124 4 6 使12使4 4 4 6 12 3 4 1 7 9 106 1317124 1 6 124 3 4 7 9 101317 1 4 1 3 4 6 7 9 10121317 1 1 4 1 4 1 使1 4 32使使1 4 1 1 4 1 1 4 6 121 4 6 使12使1 4 6 121 4 6 12 3 4 1 7 9 106 1317121 4 1 6 121 4 3 4 7 9 101317 2 4 1 3 4 6 7 9 10121317 1 2 4 2 4 1 使2 4 使沿使2 4 1 2 41 2 4 6 122 4 6 使12使2 4 6 122 4 6 12 3 4 1 7 9 106 1317122 4 1 6 122 4 3 4 7 9 101317 1 3 4 6 7 9 1012131792494 432 141540589292494 1 6 12使974 3 432 3 4 1 7 9 106 131710 6 9 9 19105 使1 3 4 6 7 9 101213171 3 4 6 7 9 1012131792494 92262 3 4 1 3 4 6 7 9 1012131792494 1 3 4 1 1A1E1A使1B1C1D使1E 1 3 4 1A使1 1A 1B120 120 3 122 122 122 122 1 1B1C6 142 150 152 2 142 150 4 5 V 2 4 5 1C1C1 1C 1D150 152 140 120 152 使6 142 1 1D 1E140 120 150 152 使150 1 1E 1 1A1B1D1E1 1C1 3 4 1 1 1 3 4 1C150-SAR 10238 metal liner 1 3 4 1 1A1B1D1E1C 1 1C使1 使1 1A1B1D1E1C1 3 1 3A140 144 120 140 120 3 3A1 3 4 1 4A122 120 4 4A1 4 6 7 9 10 6 6A6D6A使6B6C6D使 6 6A使6 6A 6B120 3 122 6 6B 6C140 120 140 6 142 150 6 6C 6D140 120 150 使142 6 6D 6 6A6D6 7 9 107 6 7A150 152 140 120 152 122 7 7A6 7 9 6 9A9A3A3 9 9A6 9 106 10A 10A 4A4 1010A 6 10 121317 12 1212A 12C 12A 12B 12C 使 12A 使1212A 12B 120 3 122 122 122 1212B 12C 140 120 140 6 142 150 140 120 150 使142 1212C 1212A 12C 12 1317 131213A 13A 7A7 1313A 1213 171217A 17A 4A10A 4 1717A 1217 1 3 4 6 7 9 10121317 使 177 2 179 108 2 135 使148 2 使使使102 1932106 2467使使使使使103 854 使 2008調Intel 150-SAQ150-S AR562007102575調76Excel 150-ANH150-AAI150-SAF150-SAO 150-SAO-H150-SNE 2009121 使退 Rosenfeld2011105 2009使104 5 5 使 757676Excel 121-127 150-ANH150-AAI 150-SAF150-SAO150-SAO-H150-SNE 14107 3 15150-AAI150-ANH 223-224 2 1776766 150-AAI150-ANH 107 1227138 7576200711調Due Diligence Investigation 調107 1219稿稿1 140-182 稿188-206 108 1 9 200720082007200820079 1120084 SBU WILLIAM SHANERWAYNE OLSON SBU WILLIAM SHANERWAYNE OLSON Intel 2007200820081 25滿NO SHOW STOPPER SBU WILLIAM SHANERWAYNE OLSON 76108 1 9 107 3 13* 150* *9001 * 85Intel Intel 142008調20081476Excel 142008142009FOUP2009122 Rosenfeld201110 5 5471-7 5FOUPRosenfeld Reticle SMIF Pod2011105 6,825,916 I-317967000000000 Our analysis of the Gudeng reticle pod has generated concerns related to Entegris US patent number 6,825,916. Foreign counterparts include Taiwan patent number I-317967 and Korean patent numbeZ 000000000. The features involved include ; an angled surface related to the top cover that urges the reticle intoposition as the door and top cover are engaged . We encourage Gudeng to review your reticle pod against the aforementioned Entegris US patent and foreign counterparts and respond to us with your findings 5471-75 20121 25EntegirsEntegrisFor , it's hard to say how many Entegris patents are necessary to license Gudeng .The design of Gudeng has been avoided to read-on Entegris patents . Could you provide the potential patents list about for Gudeng to study the license proba bility?) 5576-77 FOUP20123 20152 FOUP545455使使5414使2008調17 98N01 6 12104 4 116 7 9 10121317使6 7 9 10121317104 4 11100 54101 1 2555使 932 162 98121 5 98101 34102 35使退98貿使101 1 2555退 6 1292263 4 67N01 103 5 16104 4 117 6 6 131412126 121 6 7 9 101213176 7 9 10121317使使 100 105 54101 1 2555使1 6 121 1 3 4 962 185 1 232 962 184 1 232 966 使721428197 1 94148 95736 106 187 調200814 Rosenfeld 2011105 142008972011101 142008調4417150-SAW 171717255 196 使2 1517 971 2 98107 Intel 173,2537,244 1,234,323,436 118,600,060 Intel PurchaseOrd erInvoice 381,413,748 6 7 2 7 9 22,256,5122 7 108 1 19Intel 9 108 1 236 7 2 7 Intel PO Number 2 00000000008706 3DOC01813308 277-289 105-141 6 Intel Intel 9 00000000006287063DOC00318 87063DOC00325 124,000 124,000 290-293 Intel 2 7 9 22,256,5122 7 9 277-293 Intel 17 3,25 37,244 Intel Intel 20183 213 26-27 92851 2 100 1221971 2 102 1 1 98101 92851 2 102 1 1 100 92851 2 100 102 1 1 102 107 98101 6 52579890 98101 98101 98479949100 46101 4693963-11102 106 102 34103 39104 35105 28106 221 102 106 21-25 107 106 226 52579890 611695971 2 971 2 3 101 3 20450mmFOUP 450mmFOSB 450mmMAC152 450mm 450mm 19-20 使 使 使1 6 12使6 使使 SMIF使ESD 30106 113 3-7 108 2 1 11-14 30491 2 IC使After the reticle is manufactured , it must again be safely and cleanly transported to the IC manufacturer , where it will be stored,transported , and used within the facility . Throughout this process ,numerous opportunities exist for the reticles to be damaged , through dropping , breakage , contamination ,electrostatic discharge ESD , mishandling , etc . Thus , it has become critical to have a strategy for isolating reticles and automating their movements to ensure that reticles are delivered safely , cleanly , and economically to the correct location at the optimal time . 使8 12106 113 5 使使 使ASYST 2116,892150-SAW17,500608 3.47% 108 2 1 132121212121 SMIF1 使ASYST 16,892ASYST 38,00055 .6%00000 00000 ÷38000 ×100% =55 .6% 5,000 29.6% 5000÷16892 ×100% = 29.6% 14.8 %100%55.629.6% =14.8%4.8%107 116 1213ASYST POD 38000 500 52使500 purge 69M322056 Intel 107 12107 8 99L611018 17,000L611013 11,00035% 17,000-11,000 ÷17,000=35% 108 1 216 2 ASYST 6216873 20014 176920074 276 332 104 107 purge 20191 199 6969204 201 208 208 退208 692 69 使使使14使使1455.629.6 973 1 3 4 6 7 9 10 1213171.5 9 78869835652,579,890 ×1.5 978,869,835 961 3 使 961 2 3 971 2 185 232 9 78869835106 5 6 106 5 4 296-301 使1414 293-294 108 3 14302-306 使使 79852 390 2 392 2         108    3     22      20         108    3     22    10611 1063238 1078 107192021 1073940